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2.TSMC-Fab14P1/2、P3/4、P5、P6、P7: |
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WWT、UPW、LSR、Cu-CMP、PCW、HF |
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3.TOPPAN /台南廠、高雄廠: |
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WWT、UPW、CW、RCW |
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4.UMC-Fab12: |
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WWT、UPW、CMP、RCW |
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5.TSMC-Fab12 P1、P2、P3、P4、P6、P7: |
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CW、CCW、PCW、CMP、CuCMP、HF廢水、含銅汙泥、LSR、AWR、CWR、CCR、HFDR、ECP、UPW、WWT |
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7.TSMC-Fab2、Fab3、Fab5、Fab8: |
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UPW、CMP、LSR、含銅汙泥 |
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10.TSMC-Fab 15P1、P3、P5、P6、P7: |
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CW、CCW、PCW、CMP、CuCMP、HF廢水、含銅汙泥、LSR、AWR、CWR、UPW |
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1
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